A New Type of Automatic Matching Device

A New Type of Automatic Matching Device

ABSTRACT: Automatic matcher is used with radio frequency power supply. Our automatic matcher adopts a unique "gradient descent high-speed tuning algorithm", which can gradually slow down the speed of tuning when approaching the tuning point. The matching network is equipped with a microprocessor-controlled stepping motor circuit.

Automatic matcher is used with radio frequency power supply. Our automatic matcher adopts a unique "gradient descent high-speed tuning algorithm". This high-speed tuning algorithm can gradually slow down the speed of tuning when approaching the tuning point. The matching network is equipped with a microprocessor-controlled stepping motor circuit, which is easy even when the "Q" value is very high. Find the matching point and quickly adjust the input impedance to 50 ohms. It can match quickly, accurately and reliably under various load impedance (30W-5000W). The RF system detection module can detect the positive and negative power, standing wave ratio, peak voltage, current and DC bias voltage of the system in real time, and the matching time is less than 3 seconds when there is a preset point.

Using L-type matching network, large matching range, precise motor control system, advanced PID control algorithm combined with fuzzy control algorithm, can quickly and accurately find the best matching point, realize real-time tracking of load, maintain load stability of power acquisition. Compared with the traditional matchers at home and abroad, in a certain range of matching, the matching will go directly to the capacitance limit to stop matching and the matching will fail, even lead to the situation that the reflection power is too large to burn the RF power supply. The matcher can match well and intelligently, and quickly find the best matching point. Hand/Auto mode can be switched.

On the market, the matching regulator of common matchers will stop searching for matching points when it reaches the limit value, while the matching regulator of our matchers will automatically reverse to find matching points until the matching points are found.