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Domestic Radio Frequency Power Supply Began to Break the Import Monopoly

Domestic radio frequency power supply began to break the import monopoly


ABSTRACT: The core equipment of PECVD and etching process in photovoltaic industry is radio frequency power supply and automatic matcher. We have very professional foreign technology to provide you with the best quality products. Successful application of 9-12 matchers to a single-cavity multipole PECVD system breaks the monopoly of foreign products in this field. And replace damaged AE matchers with several solar companies.

Photovoltaic Industry


In the front-end manufacturing equipment of solar energy, the core equipment of PECVD and etching process uses radio frequency power supply and automatic matcher. We have very professional foreign technology to provide you with the best quality products.


Successful application of 9-12 matchers to a single-cavity multipole PECVD system breaks the monopoly of foreign products in this field. And replace damaged AE matchers with several solar companies.


Application of Semiconductor Technology


In semiconductor technology, etchers, sputtering platforms and PECVD machines, etching technology, PVD and plasma cleaning all need to use radio frequency power supply and automatic matcher. In semiconductor industry, our products have been tested in practice and won a lot of praise. Therefore, we will continue to do our best to replace them. It replaces the imported RF power box matcher on the domestic 8 inch line to solve the problems of aging and unmanned maintenance of the RF power supply and automatic matcher on the equipment.


Vacuum industry


The matching network used by most domestic vacuum equipment manufacturers is not automatic. We can provide automatic matchers with different impedance ranges for customers to meet the relevant requirements of customers as far as possible. Successfully matching the power supply of domestic electronic tube to achieve automatic matching effect. Cooperation with domestic universities and research institutes to replace the power supply of electronic tubes and manual matchers on the original equipment has greatly improved the equipment.

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